MECH 597(MECH 691Q)

Advanced Microsystem Technology

Reference:

Introduction to Microelectromechanical Engineering, Nadim Maluf, Artech House, 1999. (non-technical introduction, TK7875 .M35 HKUST LIB)

1. Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997 (TK7836 .M33 HKUST LIB)

2. Microsensors, Principles and Applications, Julian W. Gardner, John Wiley & Son, Inc, 1994.

3. Micromachined Tranducers Sourcebook, Gregory T.A. Kovac, McGraw-Hill, ISBN: 0072907223, 1998 (TK7872.T6 K68, HKUST LIB)

4. Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, ISBN: 0792372468, 2001 (TK7875 .S46, HKUST LIB)

5. Micromechanics and MEMS Classic and Seminal Papers to 1990, William Trimmer, IEEE. TOC

6. Semiconductor Sensors, S.M. Sze, ed., Wiley, 1994.

7. VLSI Technology, S.M. Sze, ed., 2^nd ed., McGraw-Haill, 1988.

8. The MEMS Handbook, Mohamed Gad-el-Hak ed., CRC Press, 2002. TOC, TOC2

9. Principles of medical electronics and biomedical instrumentation, C. Raja Rao, University

Press; ISBN: 8173712573, 2001 (Library call number: R856 .R35)

10. The Science and Engineering of Microelectronic Fabrication, 2^nd ed., Stephen A. Campbell, Oxford Press, 2001.

Semiconductor micromachining, S.A. Campbell and H.-J. Lewerenz, Wiley, 1998 (TK7871.85 .S4295 HKUST LIB)

11. VLSI Fabrication Principles, Silicon and Gallium Arsenide, Sorab K. Ghandhi, John Wily & Sons, 1983.

12. Plasma etching : an introduction, Dennis M. Manos, Daniel L. Flamm ed., Academic Press, 1989.

13. Polycrystalline Silicon for Integrated Circuit Applications, Ted Kaimins, Kluwer Academic.

14. Introduction to Microelectronic Fabrication, Richard C. Jaeger

(Modular Series on Solid State Devices, By: Gerold W. Neudeck and Robert F. Pierret, Editors)

15. Silicon VLSI technology : fundamentals, practice and modeling, James D. Plummer, Michael Deal, Peter B. Griffin, 2000

HKUST LIB: TK7874.75 .P58

16. Silicon processing for the VLSI era, Stanley Wolf, Richard N. Tauber.

17. Silicon semiconductor technology, W.R. Runyan, 1965.

HKUST LIB:TK7871.85 .R86

Semiconductor Integrated Circuit Processing Technology, W.R. Runyan and K.E. Bean, Addison-Wesley, 1990.

18. Microsystem Technology in Chemistry and Life Sciences, eds. Manz, A. & Becker, H.,Springer, Berlin, 1998. (TK7874 .M532, HKUST LIB)

19. RF MEMS circuit design for wireless communications, Hector J. De, Artech House, 2002. (TK5103.2 .S26, HKUST LIB)

20. RF MEMS Theory, Design, and Technology, Gabriel M. Rebeiz, John Wiley & Son, 2002/2003.

21. RF MEMS and Their Applications, V.K. Varadan, K.J. Vinoy, K.A. Jose, John Wiley & Son, 2003.

22. MEMS and NEMS: Systems, Devices, and Structures, Sergey Edward Edward Lyshevski, CRC Press, 2002.

23. Fundamentals and Applications of Microfluidics, Nam-Trung Nguyen and Steve Wereley, Artech House, 2002. NetLibrary

24. Microfluidic Technology and Applications, Michael Koch et al., Research Studies Pr, 2000.

25. Microflows: Fundamentals and Simulation, George Em Karniadakis, Ali Beskok, Springer Verlag, 2001.

26. Silicon Micromachining, Miko Elwenspoek and Henri V. Jansen, Cambridge University Press, 1999 (TK7871.15.S55 E49 HKUST LIB)

27. Microsystem Technology: A Powerful Tool for Biomolecular Studies, J. M. Kohler et al., Springer Verlag, 1999, (TP248.25.N35 M53, HKUST LIB)

28. Fundamentals of Microsystems Packaging, Rao R. Tummala, McGraw Hill, 2001.

29. Microengineering Aerospace Systems, Henry Helvajian ed., The Aerospace Press (AIAA), 1999.

30. Microactuators, M. Tabib-Azar, Kluwer Academic Publishers, London, 1998, (TJ223.A25 T33 HKUST LIB)

31. Microfluidics and BioMEMS applications, Francis E.H. Tay ed., Kluwer Academic Publishers, 2002.

32. Electrokinetics in Microfluidics, Dongqing Li, Elsevier, 2004 (ISBN: 0-12-088444-5).

33. Heat Convection in Micro Ducts, Yitshak Zohar, Kluwer Academic Publishers, 2002. (TK7872.H4 Z64, HKUST LIB)

34. Microscale Heat Conduction in Integrated Circuits and Their Constituent Films, Y.S. Ju and K.E. Goodson, Kluwer Academic Publishers, 1999.

35. Bringing Scanning Probe Microscopy Up to Speed, S.C. Minne, S.R. Manalis and C.F. Quate, Kluwer Academic Publishers, 1999.

36. Microelectromechanical Systems: Advanced Materials and Fabrication Methods, US Natl. Research Council ed., National Academy Press, 1997. online

37. MEMS : Microelectromechanical systems, I.J. Oppenheim ed., Special issue in Journal of Aerospace Engineering, Vol.16, No.2, ASCE, 2003.

38. Microreactors, W. Ehrfeld, V. Hessel and H. Löwe, Wiley-VCH, 2000 (TP248.25.B55 E37 HKUST LIB)

39. Microsystem Engineering of Lab-on-a-Chip Devices, O. Geschke, H. Klank, P. Telleman, ed., Wiley-VCH, Weinheim, Nov., 2003 (TK7874. M4894

40. Microfabrication in Tissue Engineering and Bioartificial Organs by S. Bhatia, Kluwer Academic Press, 1999 (TP248.27.A53 B47 HKUST LIB)

41. Advanced Micro & Nanosystems, Vol. 1: Enabling Technology for MEMS and Nanodevices, edited by H. Baltes et al. Wiley-VCH, 2004.

42. Advanced Micro & Nanosystems, Vol. 2: CMOS-MEMS, edited by H. Baltes et al, Wiley-VCH, 2004.

43. Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes, Ming-Hang Bao, Elsevier, 2000 (TJ223.T75 B36, HKUST LIB)

44. Mechanical microsensors, M. Elwenspoek, R.N. Wiergerink, Springer, 2001, (TK7875 .E49 HKUST LIB)

45. MEMS mechanical sensors, Stephen Beeby, Artech House, 2004 (TK7875 .M397 HKUST LIB)

46. Microsystem Technology, W. Menz, J. Mohr, O. Paul, ed., Wiley-VCH, 2001 (TK7874 .M434, HKUST LIB)

47. Microsystem technology and microrobotics, S. Fatikow, U. Rembold, ed., Springer, 1997 (TJ163 .F38, HKUST LIB)

48. Methodology for the modeling and simulation of microsystems, Bartlomiej F. Romanowicz, Kluwer, 1998 (TK7875 .R66 HKUST LIB)

49. Microsystem technology: fabrication, test and reliability, Jumana Boussey ed., Kogan Page Science, London, 2003 (TK7875 .M58 HKUST LIB)

50. MEMS and microsystems : design and manufacture, by Tai-Ran Hsu, McGraw-Hill, 2002 (TK7874 .H794 HKUST LIB)

51. Micromachined mirrors, R Conant, Kluwer, 2003, (TJ1191.5 .C665 HKUST LIB)

52. Optimal synthesis methods for MEMS, S.G.K. Ananthasuresh, ed., Kluwer, 2003, (TK7875 .A52 HKUST LIB)

53 Fabrication of silicon microprobes for optical near-field applications, P.N. Minh, O. Takahito, E. Masayoshi, CRC Press, 2002, (TJ1191.5 .M5526

54. Micromachining of engineering materials, Joseph McGeough, ed., Marcel Dekker, 2002 (TJ1191.5 .M55245 HKUST LIB)

55. Micromachines as tools for nanotechnology, H. Fujita, ed., Springer, 2003 (T174.7 .M53 HKUST LIB)

56. Micromechatronics, K. Uchino, J.R. Giniewicz, Marcel Dekker, 2003 (TJ163.12 .U24 HKUST LIB)

57. Nanobiotechnology, Concepts, Applications and Perspectives, C. M. Niemeyer, C.A. Mirkin, eds., Wiley-VCH, Weinheim, Jan, 2004.

58. Chemical Micro Process Engineering: Fundamentals, Modelling and Reactions, V. Hessel, S. Hardt and H. Lowe, eds, Wiley-VCH, 2004.

59. Introduction a la microfluidicque, Patrick Tabeling, Belin, Paris, 2003 (in French). TOC

60. Introduction to Microfluidics, Patrick Tabeling, translated by Suelin Cheng, Oxford University Press, 2005 (in English) Other URL

61. Advanced Microsystems for Automotive Applications, Valldorf, J., Gessner, W. (Eds.), Springer, 2004

62. Microelectrofluidic Systems: Modeling and Simulation, T. Zhang, R. Fair and K. Chakrabarty ed., Electrostatic Applications Inc. & CRC Press, 2002.

63. Integrated Chemical Microsensor Systems in CMOS Technology, (Microtechnology and MEMS), Andreas Hierlemann, Springer, 2005 (ISBN: 3540237828).

64. Theoretical Microfluidics, by Henrik Bruus, MIC, Dept of Micro and Nanotechnology, Technical University of Denmark, 2004

65. Implications of Emerging Micro and Nanotechnology, by Air Force Science and Technology Board, National Academy Press, 2002

66. Integrated Microfabricated Device Technologies: Advances in Gemonic, Drug Discovery, and Clinical Diagnostic Application, M.J. Heller and A.

Guttman, ed., Marcell Dekker, New York, 2002. (R857.B5 I58 2002 HKUST Lib)

67. Integrated Drug Discovery Technologies, Houng-Hau Mei, A.W. Czarnik, ed., Marcel Dekker, 2002.

68. Microoptics, 2^nd., S. Sinzinger, J. Jahns, Wiley-VCH, 2003.

69. Microfluidics for Biotechnology, Jean Berthier and Pascal Silberzan, Artech House, (ISBN: 1-58053-961-0), 2005.

70. Micromechanical Photonics, H. Ukita, Springer, 2006.

71. FlowMap–Microfluidics roadmap for the life sciences, ed. J. Ducreee and R. Zengerle, Books on Demand GmbH, Norderstedt, Germany, 2004.

72. Free Online Resources in Microfluidics: http://www.myFluidix.com, 2003

73. MEMS: A Practical Guide to Design, Analysis and Applications, Jan G. Korvink & Oliver Paul ed., William Andrew Publishing, USA, 2006

74. Foundations of MEMS, Chang LIU, Prentice Hall, 2005. TOC

75. Handbook of Micro-Reactor Engineering and Chemistry, V. Hessel, A. Renken and J.C. Schouten, Wiley-VCH, 2006.

76. Microfluidic Lab-on-a-Chip for Chemical and Biological Analysis and Discovery, Paul C.H. Li, P.H. Li and Li C.H. Li, CRC Press, 2005

77. Digital Microfluidic Biochips: Synthesis, Testing, and Reconfiguration Techniques, Krishnendu Chakrabarty & Fei Su, CRC Press, 2006

78. Optical Inspection of Microsystem, Wolfgang Osten, ed., CRC Press, 2006.

79. BioMEMS (Microsystem), Gerald A. Urban, Springer, 2006.

80. Microdrop Generation, Eric R. Lee, CRC Press, 2002

81. Micro and Nanomanufacturing, Mark J. Jackson, Springer, 2007.

82. Post-Processing Techniques for Integrated MEMS, Sherif Sedky, Artech House, (ISBN: 1-58053-901-1), 2005.

83. Microfluidics: History, Theory and Applications, CISM International Center for Mechanical Sciences, Springer, 2006

84. BioNanoFluidic MEMS, Peter J. Hesketh, Springer, 2007

85. Silicon Carbide Micro Electromechanical Systems for Harsh Environments, Rebecca Cheung et al. ed., Imperial College Press (ISBN: 1 86094 624 0) 2006.

86. Advances in Multiphysics Simulation and Experimental Testing of MEMS (Computational and Experimental Methods in Structures), A. Frangi, C. Cercignani and S. Mukherjee, ed., Imperial College

Press, 2007 (ISBN: 1860948626)

87. Micro Electro Mechanical Systems Technology & Application, Precision Instrument Development Center, Hsinchu, Taiwan, 2003 (in Chinese,

ISBN: 957-01-4264-2).

88. Microfluidic chips for analytic chemistry, edited by Z.L. Fang, et al., Science Publication Co., Beijing, 2003 (in Chinese, ISBN: 7-03-010872-8)

89. Technologies and Applications of Micromachine, Kitahara Mar, 2003. CMC Publishing Co. Japan. (in Japanese).

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